Multi-slot wafer cleaning device
Supports RCA cleaning and various etching! Significantly reduces the usage of chemicals and pure water as well as the footprint.
The product is a "multi-chamber wafer cleaning system" that offers both carrierless and carrier types. The carrierless type supports high-purity cleaning, significantly reducing the usage of chemicals and pure water, as well as the footprint. The carrier type allows for the selection of 1 or 2 cassettes for transporting a single batch. It is possible to configure the equipment for processes using acidic, alkaline, or organic chemical treatments. 【Features of the Multi-Chamber Carrierless System】 ■ Compatible with work sizes of 6-inch, 8-inch, and 12-inch wafers ■ Supports high-purity cleaning such as pre-coating cleaning through carrierless transport ■ Significantly reduces the usage of chemicals and pure water ■ Greatly minimizes the footprint ■ Drying options include IPA drying, warm water lift & IR drying, and Marangoni drying ■ Loaders and unloaders are compatible with cassettes or FOUPs *For more details, please download the PDF or feel free to contact us.
- Company：LC 洗浄装置事業部
- Price：Other
